@article{PismaZhETF.60.96, title = {Formation of a layered structure in the distribution of boron atoms initiated in silicon by ion implantation}, author = {Myasnikov, A. M. and Obodnikov, V. I. and Seryapin, V. G. and Tishkovskii, E. G. and Fomin, B. I. and Cherepov, E. I.}, journal = {πΙΣΨΝΑ Χ φότζ}, volume = {60}, issue = {2}, pages = {96}, year = {1994}, doi = {}, url = {http://jetpletters.ru/ps/0/article_19988.shtml}, }