@article{PismaZhETF.123.378, title = {VLS grating for X-Ray optics as fabricated by e-beam nanolithography with optically confirmed exponential line-density variation}, author = {Arzhanov, A. I. and Shulga, V. V. and ShelkovnikovA, S. and Aleksashin, K. E. and Neliubov, A. Yu. and Kolesnikov, A. O. and Logachev, M. D. and Shatokhin, A. N. and Vishnyakov, E. A. and Ragozin, E. N. and Naumov, A. V.}, journal = {πΙΣΨΝΑ Χ φότζ}, volume = {123}, issue = {5}, pages = {378}, year = {2026}, doi = {}, url = {http://jetpletters.ru/ps/0/article_37112.shtml}, }