@article{JETPL.120.304,
    title = {Effect of Etching Methods on Dielectric Losses in Transmons},
    author = {Chudakova, T. A. and Mazhorin, G. S. and Trofimov, I. V. and Rudenko, N. Yu. and Mumlyakov, A. M. and Kazmina, A. S. and Egorova, E. Yu. and Gladilovich, P. A. and Chichkov, M. V. and Maleeva, N. and Tarkhov, M. A. and Chichkov, V.},
    journal = {JETP Lett.},
    volume = {120},
    issue = {4},
    pages = {298},
    year = {2024},
    doi = {10.1134/S0021364024602410},
    url = {http://jetpletters.ru/ps/dx/10.31857/S0370274X24080244},
    note = {[Pisma v ZhETF 120, 304 (2024)]}
}