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VOLUME 91 | ISSUE 5 | PAGE 249
Determination of electron temperature in low-pressure plasmas by means of optical emission spectroscopy
Abstract
A simple model, allowing to determine the electron temperature in a steady-state low-pressure plasma, is proposed. The model makes use of optical cross-sections and therefore takes into account direct and cascade excitation from ground and metastable states. Spectroscopic data from Mitic et al. (New J. Phys. 11, 083020 (2009)) are used to illustrate the performance of the method.