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VOLUME 116 (2022) | ISSUE 5 | PAGE 282
Numerical simulation of GaAs/AlOx high index contrast sub-wavelength gratings for GaAs-based vertical cavity surface emitting lasers
DOI: 10.31857/S1234567822170037
Abstract
A GaAs/AlOx high index contrast sub-wavelength grating (HCG) with TE polarization is presented for the GaAs-based vertical cavity surface emitting laser (VCSEL). The rigorous coupled wave analysis (RCWA) method is employed to simulate the dependence between its reflection characteristics and grating parameters. Especially, the effects of the stress buffer layer, shape errors, and incident angle on refractivity are also analyzed in detail. The HCG has a large reflection bandwidth up to 97 nm with good polarization selectivity, and exhibits large tolerance in preparation, which makes it easier to integrate with the VCSEL. What's more, its sensitivity to incident angles facilitates the single-mode VCSELs' implement.