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VOLUME 72 (2000) | ISSUE 9 | PAGE 658
Laser writing of sub-wavelength structure on silicon (100) surfaces with particle enhanced optical irradiation
PACS: 42.82.-m
Spherical 0.5 μνα silica particles were placed on Silicon (100) substrate. After laser shinning with a 248 nm KrF excimer laser, hillocks with size of about 100 nm were obtained at the original position of the particles. Mechanism of the formation of the sub-wavelength structure pattern was investigated and found to be the near-field optical resonance effect induced by particles on surface. Theoretical calculation result of the near-field light intensity distribution was presented, which was in agreement with the experimental result. The method of particle enhanced laser irradiation has potential applications in nanolithography.